Advanced materials for the 3D microbattery
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چکیده
Out recent achievements in the development of three-dimensional (3D) thin film microbatteries on silicon and on microchannel plates (MCP) are presented. In such 3D microbatteries, the battery sandwich-like structure, including electrodes, electrolyte and current collectors, is deposited conformally on all available surfaces, thereby utilizing the dead volume of the substrate. Thin-film molybdenum oxysulfide and iron sulfide cathodes were deposited galvanostatically. XRD, XPS and TOF–SIMS characterizations indicated that the submicron thick MoO S
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تاریخ انتشار 2006